| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw detector and a flaw detection method for detecting precisely a flaw finally pernicious in a finished product, using a proper learning data, as to flaw detection in an upstream process. SOLUTION: A flaw image data imaged in flaw detection in a downstream process of high determination precision is collated with a flaw image data imaged in the flaw detection in the upstream process, the pernicious flaw image data in the upstream process corresponding to the flaw image data getting finally pernicious is accumulated as learnt data in flaw detectors in the upstream process, the precision of the flaw detection is thereby enhanced remarkably in the upstream process, and coping with the pernicious flaw of making the defective product not flow in the downstream process, of changing a production schedule or the like is allowed in an early stage, when the pernicious flaw is detected in the upstream process. COPYRIGHT: (C)2007,JPO&INPIT
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