发明名称 |
Förfarande för framställning av en plattkondensator och plattkondensatorarrangemang |
摘要 |
<p>A fabrication method for parallel-plate structures and a parallel-plate structure arrangement, wherein the structures have a middle layer, grown on a substrate and disposed between top and bottom electrode layers, wherein the middle layer and the top and bottom electrode layers are deposited on a bottom substrate, and wherein the middle layer is grown first and the top and bottom electrodes are essentially deposited afterwards.</p> |
申请公布号 |
FI20060832(A) |
申请公布日期 |
2008.03.19 |
申请号 |
FI20060000832 |
申请日期 |
2006.09.18 |
申请人 |
VALTION TEKNILLINEN TUTKIMUSKESKUS, |
发明人 |
RIEKKINEN,TOMMI;MATTILA,TOMI |
分类号 |
H01G4/33;H01G4/12;H01G4/40;H01L41/29;H01L41/39;H05K1/16 |
主分类号 |
H01G4/33 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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