FABRICATION METHOD FOR QUASI-PHASE-MATCHED WAVEGUIDES

摘要

A method for fabricating quasi-phase-matched waveguides is provided to acquire more precise and uniform high-quality cyclical domain inversion element. A method for fabricating quasi-phase matched waveguides includes the steps of: forming a metallic mask on a ferroelectric single-crystal substrate(200); etching the substrate by using the metallic mask; removing the metallic mask; forming a conductive layer on the substrate formed after removing the metallic mask; forming a dipole region by applying an electric field to the conductive layer; and removing the conductive layer and planarizing a substrate formed after forming the dipole region.