发明名称 Apparatus and method for nano plasma deposition
摘要 An apparatus and method for initiation and control of a sustained metal plasma and nano plasma (macroparticulate) deposition methods for preparing modified metal coatings are provided. The plasma deposition process can be tightly controlled by virtue of a device that incorporates a plasma arc initiator component and an internal power supply that is capable of controlling dwell time on the target and the size range of particles ejected in the plasma arc.
申请公布号 US2008095952(A1) 申请公布日期 2008.04.24
申请号 US20070657222 申请日期 2007.01.23
申请人 STOREY DANIEL M 发明人 STOREY DANIEL M.
分类号 C23C14/30;B23K9/18;G05F1/00 主分类号 C23C14/30
代理机构 代理人
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