| 摘要 |
There is provided a sample manipulating apparatus 1 which is an apparatus of manipulating a sample S mounted on a substrate surface 2a, in which at least a position data and a shape data are acquired by observing the sample S, thereafter, a tweezers 4 is positioned by moving means 5 such that the sample S is positioned between an observing probe 15 and a grasping probe 16 based on the two data, after the positioning, a height of the tweezers 4 is set to a position of being remote from the substrate surface 2a by a constant distance by moving means 5 while monitoring a result of measurement by displacement measuring means 7, thereafter, the grasping probe 16 is moved to a side of the observing probe 15 while monitoring the result of measurement by the displacement measuring means 7 at the set height and the sample S is grasped while detecting a grasping start point.
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