| 摘要 |
<p>Provided is a substrate adsorbing stage device which is highly effective in neutralizing a substrate, in which the consumption of an ionizer is suppressed to a minimum, and the running cost of which is low. A substrate adsorbing stage device (1) comprises a mounting portion having an air hole (14) having an opening (14a) in a mounting surface (11) for a substrate (P), a vacuum pump (30) for suctioning gas from the air hole (14), a blower (40) for spraying gas from the air hole (14), and an ionizer (50) for ionizing the sprayed gas. The substrate adsorbing stage device (1) sprays the gas from the blower (40) on the substrate (P) held by adsorption by the mounting surface (11) by suction by the vacuum pump (30) and thereby separates the substrate (P) from the mounting surface (11). In the substrate adsorbing stage device (1), the ionizer (50) is provided on the position of a common pipe (62) between the air hole (14) and a suctioning pipe (63) and a blast pipe (64). The substrate adsorbing stage device (1) further comprises an ionizer control unit (75) for activating the ionizer (50) in communication with the operating condition of the blower (40).</p> |
