发明名称 Through-Chip Via Interconnects for Stacked Integrated Circuit Structures
摘要 A stacked IC structure has an integrated circuit (IC) having a front IC side, a back IC side, and a first conductive feature formed on the front IC side. A through-chip via connects to the first conductive feature on the front IC side. A substrate has an external circuit formed on a front surface. The IC attaches to the front surface of the substrate and the through-chip via forms a connection between the first conductive feature and the external circuit.
申请公布号 US2009057872(A1) 申请公布日期 2009.03.05
申请号 US20070847239 申请日期 2007.08.29
申请人 EHLERS ERIC R;CLATTERBAUGH JIM;BONSE MATHIAS;SHIRLEY TIMOTHY E;ORR JERRY R 发明人 EHLERS ERIC R.;CLATTERBAUGH JIM;BONSE MATHIAS;SHIRLEY TIMOTHY E.;ORR JERRY R.
分类号 H01L23/52;H01L21/00;H01L23/04 主分类号 H01L23/52
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