| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device which comprises holding means capable of appropriately and simply controlling air leakage.SOLUTION: A processing device (2) comprises holding means (10) which holds a workpiece (11) by vacuum suction. A flowmeter (20) for measuring air flow is arranged on a suction path (18) connecting the holding means to an air suction source (24). On the basis of a value measured by the flowmeter, the processing device determines air leakage occurring in the holding means that is sucking the workpiece.SELECTED DRAWING: Figure 1 |
