Resonator element, resonator, oscillator, electronic device, and moving object

摘要

In a resonator element, when a width of each of arm portions of vibrating arms along an X-axis direction is set to W1, a width of each of two portions with a groove interposed therebetween, along the X-axis direction, in a principal surface of the vibrating arm is set to W3, and 2×W3/W1 is set to η, the relation of 14.2%<η<100% is satisfied.

主权项

1. A resonator element comprising:
a vibrating arm that has a fixed end and a free end which extend along a first direction, the vibrating arm including:
a weight portion that is disposed on the free end of the vibrating arm, andan arm portion that is disposed on the fixed end of the vibrating arm, a groove disposed in the vibrating arm along the first direction in at least one principal surface of a first principal surface and a second principal surface of the vibrating arm which serve as front and back sides of the vibrating arm, respectively, and in the principal surface provided with the groove, when a width of the arm portion along a second direction crossing the first direction is set to W1, a width, along the second direction, of a portion interposed between a side surface of the arm portion, which connects the first principal surface and the second principal surface, and an outer edge of the groove which is aligned with the side surface extending along the second direction is set to W3, 2×W3/W1 is set to η,a relation of 14.2%<η<100% is satisfied, and when a width of the weight portion along the second direction is set to W2, a relation of 1.43≦W2/W1≦1.79 is satisfied.