Micromechanical measuring element and method for producing a micromechanical measuring element

摘要

A micromechanical measuring element includes a carrier and a sensitive element connected to the carrier by a first solder connection and a second solder connection. The sensitive element is contacted electrically by the first solder connection. The sensitive element, the carrier and the second solder connection form a first chamber. The first chamber has a first opening.

主权项

1. A micromechanical measuring element, comprising:
a carrier; a sensitive element connected to the carrier by a first solder connection and a second solder connection, wherein the sensitive element is electrically contacted by the first solder connection; elastomer bodies arranged between the sensitive element and the first and second solder connections; and a metallization arranged between the elastomer body and the first solder connection, wherein the metallization has a meandering or helical shape, and wherein the sensitive element, the carrier and the second solder connection form a first chamber, the first chamber having a first opening.