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发明名称
HEAT-TREATING FURNACE
摘要
申请公布号
JPH0372622(A)
申请公布日期
1991.03.27
申请号
JP19890209175
申请日期
1989.08.11
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
GOTO SATORU
分类号
H01L21/205;H01L21/22
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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