SILICON SEED CRYSTALS, THEIR PRODUCTION AND PROCESS FOR PRODUCING SILICON SINGLE CRYSTAL BY USING THESE SEED CRYSTALS

摘要

PROBLEM TO BE SOLVED: To provide silicon seed crystals and process for producing the same capable of improving the success rate of single crystallization in a process for producing the silicon single crystal without executing so-called necking in the process for producing the silicon single crystal by a Czochralski method. SOLUTION: The shape at the front end of the silicon seed crystal to be brought into contact with a silicon melt in the process for producing the silicon single crystal by the Czochralski method is formed to a pointed shape or a shape formed by cutting off its pointed front end. The max.. vertexαthereof is >=3 to <=28 deg.. In such a case, the front end may be. etched or may be formed by using the round part formed by the Czochralski method. A silicon single crystal rod of a desired diameter is grown by using such silicon seed crystal without executing the necking.