摘要 |
<p>PROBLEM TO BE SOLVED: To directly keep the temperature near an exposure head within a prescribed range so that an adverse effect is not brought by the change of the transmitting characteristic of the exposure head occurring because of the temperature. SOLUTION: This temperature control mechanism is provided with a surface heater 36 correcting the temperature drop of the exposure head 8, a heat insulating member 47 covering the heater 36 and the head 8, a pipe 37 transferring a thermal transferring medium accompanying heating by the heater 36 or the rise in the ambient temperature, a Peltier element 40 cooling the thermal transferring medium transferred by the pipe 37, heat discharge means 41 and 42 discharging the heat of the element 40 and a thermistor 35 measuring the temperature of the head 8. Based on the measured result of the thermistor 35, the head 8 can be held within the prescribed temperature tang by a controller 12 controlling the heater 36 and the pipe 36.</p> |