ELECTROSTATIC CHUCK, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck having a high volume resistance and a high heat conductivity, and a method for manufacturing the electrostatic chuck to offer an electrostatic chuck utilizing a coulomb force under a high temperature environment. SOLUTION: The electrostatic chuck 100 includes a ceramic substrate 11 having heat conductivity higher than that of a dielectric layer 12; the ceramic dielectric layer 12 which is formed on the substrate 11, has a volume resistivity at 100°C of 1×1015Ωcm or higher, and contains the same main component as the substrate 11; and an electrode 20 which generates an electrostatic attractive force. COPYRIGHT: (C)2007,JPO&INPIT