| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type pressure sensor capable of preventing short circuit between a movable electrode and a fixed electrode and detecting pressure at high sensitivity. SOLUTION: A first conductive member 12 is buried in a cavity 17 of a glass substrate 11. A second conductive member 13 is buried in a region other than the cavity 17 of the glass substrate 11. On a main face 11b of the glass substrate 11, a drawer electrode 14a is formed to be electrically connected with an exposed section of the first conductive member 12, and a drawer electrode 14b is formed to be electrically connected with an exposed section of the second conductive member 13. The first conductive member 12 on the main face 11a side of the glass substrate 11 has a recessed part 12a becoming deep toward the center. A silicon substrate 16 having a pressure sensitive diaphragm 16a as a movable electrode of the pressure sensor is joined onto a joint face 11d of the main face 11a of the glass substrate 11. COPYRIGHT: (C)2007,JPO&INPIT
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