| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece inspection system that can inspect a workpiece, such as an electronic substrate in a noncontact manner, and that has high utilization efficiency of an inspection constitution. SOLUTION: The workpiece inspection system inspects an inspected workpiece, moving in a manufacturing process having an electronic circuit mainly with an inspection control section of an inspection device. The inspected workpiece has an RFID tag, and the inspection device has an interrogation apparatus, capable of accessing the RFID tag under control by the inspection control section. The RFID tag has an analog interface section, capable of taking in level information of an analog signal at a predetermined part of the electronic circuit section. The inspection control section executes inspection, after fetching the level information of the analog signal. COPYRIGHT: (C)2007,JPO&INPIT
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