IRON ION IMPLANTATION METHOD AND IRON ION IMPLANTATION QUANTITY CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an iron ion implantation method and an iron ion implantation quantity control device for reliably forming a target iron coat on the inner surface of a cooling pipe by appropriately adjusting the concentration and implantation time of iron ion implanted into cooling water flowing in a condenser cooling pipe. SOLUTION: The iron ion implantation quantity control device is composed of: an iron ion implanting means 3 implanting iron ion into cooling water flowing in the cooling pipe 2 of the condenser 1; an inlet side iron ion concentration measuring means 4 measuring iron ion concentration in the cooling water on the inlet side of the cooling pipe 2; an outlet side iron ion concentration measuring means 5 measuring iron ion concentration in the cooling water on the outlet side of the cooling pipe 2; an iron adhesion quantity computing means for computing the quantity of iron adhesion to the cooling pipe from the concentration difference of iron ion concentration in the cooling water between the inlet side and outlet side of the cooling pipe 2; and a control means for controlling the concentration and implantation time of iron ion implanted into the cooling water based on the target value of the iron adhesion quantity and the computed iron adhesion quantity to the cooling pipe 2. COPYRIGHT: (C)2007,JPO&INPIT