| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor and a manufacturing method thereof capable of detecting chemical substance of very small quantity contained in a breath.SOLUTION: A gas sensor 30 includes: a substrate 21; a graphene membrane 13 disposed above the substrate 21; and a first electrode 12a and a second electrode 12b which are in contact with the graphene membrane 13. The graphene membrane 13 have a network structure in which plural arm chair shaped graphene nano-ribbons are connected to each other. The edge of the graphene nano-ribbon is modified by Cl, F, OH, NH, or CHetc.SELECTED DRAWING: Figure 10 |
