| 摘要 |
PROBLEM TO BE SOLVED: To improve recovery efficiency of product gas with respect to raw material gas.SOLUTION: A first adsorption part (4, adsorption tanks 4A, 4B) and a second adsorption part (6, adsorption tanks 6A, 6B) each of which connect at least two adsorption tanks packed with adsorbent in series and allows raw material gas to flow therethrough and performs adsorption processing are provided. The second adsorption part performs adsorption processing in a timing different from adsorption processing of the first adsorption part. The first communication part (a pressure equalizing channel 20), when transferring the first adsorption part from an adsorption process to a pressure equalizing process, communicates the output side of the adsorption tank (the adsorption tank 4A) connected to the upstream side of the first adsorption part with the input side of the adsorption tank (the adsorption tank 6A) connected to the upstream side of the second adsorption part and causes product gas to flow. The second communication part (a pressure equalizing channel 22), when transferring the second adsorption part from the adsorption process to the pressure equalizing process, communicates the output side of the adsorption tank (the adsorption tank 6A) connected to the upstream side of the second adsorption part with the input side of the adsorption tank (the adsorption tank 4A) and causes product gas to flow.SELECTED DRAWING: Figure 1 |
