Reticle pod

摘要

A reticle pod includes an outer pod shell and an outer pod door disposed under the outer pod shell. The outer pod door has at least one gas control hole. A seal ring is disposed between the outer pod shell and the outer pod door. A valve is disposed in each gas control hole. The outer pod shell and the outer pod door are configured to form an enclosure space in order to store a reticle. The seal ring seals the gap between the outer pod shell and the outer pod door. The at least one valve is configured to control gas flow in and out of the enclosure space.

主权项

1. A reticle pod, comprising:
an inner pod cover; an inner pod base plate, wherein the inner pod cover and the inner pod base plate are configured to form an inner space to store a reticle; an outer pod shell; an outer pod door disposed under the outer pod shell, the outer pod door having two gas purge holes and two vacuum holes; a seal ring disposed between the outer pod shell and the outer pod door; and four valves, each valve disposed in a respective gas purge hole or vacuum hole; wherein the outer pod shell and the outer pod door are configured to form an enclosure space around the inner pod cover and the inner pod base plate, the seal ring seals a gap between the outer pod shell and the outer pod door, the four valves are configured to control gas flow in and out of a same chamber of the enclosure space, an outer edge of the chamber being bounded by the outer pod door and the outer pod shell, and wherein the four valves are located within a solid section of the outer pod door and do not extend beyond the solid section of the outer pod door.