LIGHT SOURCE DEVICE

摘要

In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be lower than an energy density of the laser light in the lighting start region RS when the laser support light is put on. For this reason, when the laser support light is maintained, a laser light L is radiated to the lighting start region RS at an energy density of a degree where sputtering does not occur. Therefore, in the light source device, because sputtering in a light emission sealing body can be suppressed, a sufficiently long life can be realized.

主权项

1. A light source device comprising:
a laser unit that emits a laser light; a light source that has a light emission sealing body of which an internal space is filled with light emission gas and a lighting start region provided in the internal space; an optical system that guides the laser light to the internal space; and a control unit that controls an energy density of the laser light in the lighting start region, wherein the light source maintains a laser support light to be a plasma emission of the light emission gas put on by radiation of the laser light from the laser unit, by the radiation of the laser light from the laser unit, in the internal space, and the control unit causes the energy density of the laser light in the lighting start region when the laser support light is maintained to be lower than the energy density of the laser light in the lighting start region when the laser support light put on.