Apparatus and Method for Metastable Enhanced Plasma Ignition

摘要

Methods and apparatus for igniting a process plasma within a plasma chamber are provided. A quantity of metastable atoms generated within a metastable generation volume are provided along with an ignition gas to a plasma generation volume defined by a plasma chamber. The quantity of metastable atoms generated is sufficient to allow at least a predetermined quantity of the metastable atoms to flow from a first location within the plasma generation volume to a second location within the plasma generation volume. A process plasma is ignited within the plasma generation volume by applying an electric field to the plasma generation volume that includes the metastable atoms flowed therein.

主权项

1. A method for igniting a process plasma within a plasma chamber, the method comprising:
providing a plasma chamber defining a plasma generation volume within which the process plasma forms; generating a quantity of metastable atoms within a metastable generation volume; flowing a gas mixture comprising the generated metastable atoms and an ignition gas into the plasma generation volume, the quantity of metastable atoms generated is sufficient to allow at least a predetermined quantity of the metastable atoms to flow from a first location within the plasma generation volume to a second location within the plasma generation volume; and igniting the process plasma within the plasma generation volume by applying an electric field to the plasma generation volume that includes the metastable atoms flowed therein.