| 发明名称 |
PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD THEREOF, ELECTRONIC EQUIPMENT, AND MOVABLE BODY |
| 摘要 |
A physical quantity sensor includes: a base; a cover; a function element provided inside a cavity formed by the base and the cover; and a protection film with which a principal surface of the base, a bonding boundary portion between the principal surface of the base and the cover, and the cover are coated continuously, wherein the protection film is an inorganic material film or an organic semiconductor film. |
| 申请公布号 |
US2016258977(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201615046883 |
申请日期 |
2016.02.18 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
NARUSE Atsuki |
| 分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A physical quantity sensor, comprising:
a base; a cover; a function element provided inside a cavity formed by the base and the cover; and a protection film with which a principal surface of the base, a bonding boundary portion between the principal surface of the base and the cover, and the cover are coated continuously, wherein the protection film is an inorganic material film or an organic semiconductor film. |
| 地址 |
Tokyo JP |
