Optical system and measurement method thereof

摘要

An optical system for measuring an observed object includes an illuminant component, an imaging component, and an optical component. The illuminant component generates a measuring light. The optical component including a mirror and a beam splitter is located between the illuminant component and the imaging component. The mirror is located between the illuminant component and the observed object, the beam splitter is located between the mirror, the observed object, and the imaging component. The measuring light is projected to the observed object via the mirror and beam splitter, and an imaging light that has been generated from the illuminant component and reflected by the observed object is projected to the imaging component via the beam splitter, the imaging light and the measuring light intersect at the beam splitter. The present invention also provides a measurement method.

主权项

1. An optical system for measuring an observed object comprising:
an optical apparatus comprising:
an illuminant component for generating a measuring light;an imaging component comprising an ocular assembly and an objective assembly; and an optical component located between the illuminant component and the imaging component, the optical component comprising a mirror and a beam splitter, wherein the mirror and the illuminant component are aligned in a first axis; the observed object, the beam splitter, and the objective assembly are aligned in a second axis; wherein the beam splitter is disposed between the observed object and the objective assembly; wherein the measuring light is reflected to the observed object via the mirror and the beam splitter, an imaging light that has been generated from the illuminant component and reflected by the observed object is projected to the imaging component via the beam splitter, the imaging light and the measuring light intersect at the beam splitter.