| 发明名称 |
SYSTEMS AND METHODS FOR CONFORMING TEST TOOLING TO INTEGRATED CIRCUIT DEVICE WITH WHIRLWIND COLD PLATE |
| 摘要 |
A thermal control unit used to maintain a set point temperature on an integrated circuit device under test, has at least one cooling plate configured to facilitate the testing of integrated circuits where the device under test requires efficient cooling. |
| 申请公布号 |
US2016313390(A1) |
申请公布日期 |
2016.10.27 |
| 申请号 |
US201615136768 |
申请日期 |
2016.04.22 |
| 申请人 |
ESSAI, INC. |
发明人 |
Barabi Nasser;Ho Chee Wah;Tienzo Joven R.;Kryachek Oksana;Nazarov Elena V. |
| 分类号 |
G01R31/28;F28D15/00;F28F9/02;F28F13/02;F28F3/12;F28F27/02;F28F13/12 |
主分类号 |
G01R31/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A thermal engine structure useful in association with an integrated circuit (IC) device tester, the thermal engine structure comprising:
an inlet manifold; an outlet manifold; a whirlwind cold plate including:
a plurality of micro-channels embedded in the whirlwind cold plate;an array of linear cuts grooved in the whirlwind cold plate; and a heater coupled to the whirlwind cold plate. |
| 地址 |
Fremont CA US |
