METHOD FOR MAKING DIFFRACTIVE OPTICAL ELEMENTS

摘要

FIELD: optics.SUBSTANCE: method of making diffractive optical elements includes laser processing of thin-film layers of metal deposited on a substrate made from a transparent material. Phase relief of diffraction optical element is formed by oxidation of thin-film metal layer in the oxygen medium with scanning laser radiation to form transparent metal oxide.EFFECT: technical result consists in producing diffractive optical elements with higher efficiency and accuracy of micro-relief of arbitrary topology.4 cl, 4 dwg