Imaging measurement system

摘要

An apparatus for, and method of, improving the resolution of a conventional imaging system by effectively increasing the bandwidth of an imaging system's transfer function. An object is first illuminated with periodic illumination. The phase of the periodic illumination is varied while the periodic illumination is used to scan the object. A plurality of images are received by an imaging system whereby the images received correspond to variations in the phase of the periodic illumination. These images are subsequently processed to extract information in phase with the periodic illumination and information 90 degrees out of phase with the periodic illumination. In an optical microscope system, the periodic illumination also provides automatic focusing and three-dimensional imaging capabilities.