| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device for a transparent panel, capable of detecting the flaws of the transparent panel by combining flaw inspection, such as flaw inspection due to a schlierene method, flaw inspection due to dark field or the like, with the flaw inspection device of the transparent panel for introducing linear light from an end surface to inspect the flaw of the transparent panel. SOLUTION: The flaw inspection device for the transparent panel is equipped with a first light irradiation means 103 for introducing a linear light 3 from the end surface 2 of the transparent panel sample 1, a second light irradiation means 208 for irradiating the surface 4 of the transparent panel sample 1 with the almost parallel incident collimated luminous flux 9 formed from a spot light source 201, a third light irradiation means 302 for irradiating the surface 4 of the transparent panel sample 1 with the light from an oblique direction, a first detection means 107 for detecting the scattered light from the transparent panel sample 1 in the dark field and a second detection means 213 for detecting the almost parallel transmitted collimated luminous flux 10 transmitted through the transparent panel sample 1 by schlierene method. COPYRIGHT: (C)2005,JPO&NCIPI
|
