| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-reliable measuring device for performing position detection of an opening/closing means by a flow rate detection means. SOLUTION: This device is constituted of: a fluid passage 1; the flow rate detection means 3 for detecting the flow rate in the fluid passage 1; the opening/closing means 2 for opening/closing the fluid passage 1 equipped with the flow rate detection means 3; a pressure detection means 4 for detecting the pressure in the fluid passage; and a control part 5 for controlling and determining each means. The flow rate detection means capable of position detection of ultrasonic measurement or the like is used in common for position detection of the opening/closing means. COPYRIGHT: (C)2005,JPO&NCIPI
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