| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method capable of effectively utilizing a disc D of a good coating layer having uniform thickness with no patchy part at anywhere without wasting a coating liquid, and its apparatus. SOLUTION: In the blade coating method, a surface of a disc-like flat substrate with the coating liquid by a blade. In the coating method, the blade is moved from an upstream side to a downstream side while retaining a predetermined clearance with the flat substrate in the state that a mask having a large opening for coating the whole surface of the flat substrate with the coating liquid and the coating layer is formed by making flowing out the coating liquid from a gap in a downstream of the blade on the mask while moving the coating liquid fed in the upstream side of the blade by the blade. A plurality of blades are used and after the first blade performs coating, the first blade is retreated and the second blade performs subsequent coating in a reverse direction. COPYRIGHT: (C)2006,JPO&NCIPI
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