发明名称 Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
摘要 <p>An apparatus for enhanced light transmission is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, and a periodic surface topography provided on at least one of the first and second surface of the metal film. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film. The apparatus may have a single aperture or a plurality of periodically arranged apertures. Wavelength-selective optical filters, spatial optical filters, light collectors, near-field scanning optical microscope probes and photolithographic masks are also provided. &lt;IMAGE&gt;</p>
申请公布号 EP1008870(B1) 申请公布日期 2007.12.12
申请号 EP19990116396 申请日期 1999.08.20
申请人 NEC CORPORATION 发明人 EBBESEN, THOMAS W.;GRUPP, DANIEL E.;THIO, TINEKE;LEZEC, HENRI J.
分类号 G02B5/20;G02B21/00;G01Q60/06;G01Q60/22;G02B5/18;G02F1/01;G03F1/08;H01L21/027 主分类号 G02B5/20
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