发明名称 MICROLENS, AND METHOD OF FABRICATING THEREOF
摘要 A microlens for an image sensor fabricated using a seed layer and a method for fabrication of the same that does not involve a reflow process. The method of fabricating a microlens includes forming a seed layer pattern on a wafer, rounding the corner portions of the seed layer pattern by applying plasma, and then depositing an oxide film on the seed layer pattern.
申请公布号 US2009059391(A1) 申请公布日期 2009.03.05
申请号 US20080200944 申请日期 2008.08.29
申请人 SHIM CHEON-MAN 发明人 SHIM CHEON-MAN
分类号 G02B3/02;B29D11/00 主分类号 G02B3/02
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