发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PATTERN MANUFACTURING METHOD USING THE COMPOSITION, AND ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition for forming a cured film with excellent durability and heat resistance, a photosensitive resin composition for forming a cured film with excellent durability and heat resistance, even at a low temperature, and an electronic device with high reliability having a pattern of satisfactory shape and characteristic formed of the photosensitive resin composition. <P>SOLUTION: The present invention relates to the photosensitive resin composition containing a polyimide resin having an acid-dissociative group, a compound of generating sulfonic acid by irradiation of light, and a crosslinking agent, a manufacturing method for the pattern using the composition, and the electronic device having the pattern. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009086311(A) 申请公布日期 2009.04.23
申请号 JP20070256204 申请日期 2007.09.28
申请人 FUJIFILM CORP 发明人 WATANABE YASUSHI;SATO KENICHIRO
分类号 G03F7/039;C08G73/10;G03F7/004;G03F7/038;H01L21/027 主分类号 G03F7/039
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