| 摘要 |
The present invention relates to a substrate supporting rack including: a substrate supporting part which supports a substrate by coming in contact with a bottom of the substrate, and is installed to be movable up and down depending on the supporting the substrate; a rotary member which has one end located at the lower side of the substrate supporting part, has the other end located in a separation area separated from an area where the substrate is supported, is installed to be rotatable around a hinge axis, and rotates around the hinge axis when the substrate is supported by the substrate supporting part and the substrate supporting part moves downwardly; and a detection sensor to detect the position of the rotary member. The substrate supporting rack can detect existence of the substrate accurately even though liquid like pure water is stained on a surface of the substrate on the substrate supporting part. |
