Multilayer ceramic substrate and manufacturing method therefor

摘要

A multilayer ceramic substrate includes a ceramic element body including a plurality of stacked ceramic layers, a resistor including a resistance film disposed between the ceramic layers, and a lead via conductor penetrating the ceramic layers in a thickness direction and connected at a first end portion to the resistance film. The resistance film and the lead via conductor both contain, for example, Ni and Cu that constitute an alloy resistive material. A concentration of the Ni component in the lead via conductor has a gradient structure that is comparatively high in the first end portion connected to the resistance film and gradually decreases from the first end portion toward a second end portion opposite therefrom.

主权项

1. A multilayer ceramic substrate comprising: a ceramic element body including a plurality of stacked ceramic layers;
a resistor including a resistance film disposed between at least two of the ceramic layers; and a lead via conductor penetrating the ceramic layers in a thickness direction and connected at a first end portion to the resistance film; wherein the resistance film and the lead via conductor both contain at least a first metallic component and a second metallic component that constitute an alloy resistive material; and a concentration of the second metallic component in the lead via conductor has a gradient structure that is comparatively high in the first end portion connected to the resistance film and gradually decreases from the first end portion toward a second end portion opposite therefrom; wherein the first metallic component is Cu and the second metallic component is Ni.