发明名称 GLASS PLATE AND MANUFACTURING METHOD THEREFOR
摘要 The present invention addresses the technical problem of contributing to the densification of semiconductor packages by providing: a glass plate that is suitable for supporting a processed substrate used in high-density wiring and has a high end-surface strength; and a manufacturing method for the glass plate. This glass plate is characterized in that the thickness deviation of the entire plate is less than 2.0 μm, and all or a portion of an end surface of the glass plate is a melt-solidified surface.
申请公布号 WO2016111158(A1) 申请公布日期 2016.07.14
申请号 WO2015JP85678 申请日期 2015.12.21
申请人 NIPPON ELECTRIC GLASS CO., LTD. 发明人 KATAYAMA HIROKI;NAKAJIMA HIROSHI
分类号 C03B29/02;C03C19/00;H01L23/12;H01L23/15 主分类号 C03B29/02
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