Optical system, inspection system and manufacturing method

摘要

Systems and methods for inspection are provided utilizing a wide angle optical system. The optical system includes a wide angle input lens group and an output lens group. The wide angle input lens group is configured to receive wide-angle radiation, e.g., having an angular spread of 60 degrees or more, from an object surface, and produce imageable radiation. The wide angle input lens group is arranged such that no intermediate focused image is formed within or after the wide angle input lens group. The output lens group is configured to receive the imageable radiation from the wide angle input lens group and focus the imageable radiation onto an image plane to image at least part of the object surface. A detector receives the image of the at least part of the object surface and, based on the received image, detects, for example, contamination on the object surface.

主权项

1. A system comprising:
an optical relay system comprising:
an input condenser including a wide angle lens as a first lens element which is configured to receive radiation from a surface of an object, the input condenser configured to produce imageable radiation therefrom, such that there is no intermediate focused image formed within or after the input condenser, andan output lens group configured to receive the imageable radiation from the input condenser and focus the imageable radiation onto an image plane to image at least part of the object surface; and a detector configured to receive the image of the at least part of the object surface and, based on the received image, detect contamination, an abnormality of the object surface, and/or a pattern on the object surface, wherein the image plane is coplanar with a detector surface.