DEVICE FOR AT LEAST EMPTYING A TRANSPORT CONTAINER

摘要

A device for at least emptying a transport container having a stack of plate-shaped items, including semiconductor wafers and/or packaging material, includes at least one measuring device and a holder at least part of which can travel into the transport container, the holder having: a holding surface; a number of holding nozzles for at least holding an item in the stack; and, in the region of the holding surface, at least one recess for the measuring device for acquiring measurement data from the item in the stack. In order to permit the transport container to be emptied in a stable manner, the holder includes at least one separating nozzle arranged outside the holding surface and arranged on the holder such that the nozzle(s) can move between a rest position and a separating position, in such a way that when the separating nozzle is in the separating position, a gas stream directed towards the end face of the stack is formed, in order to release at least one item in the stack that is adhered to the item held by the holder.

主权项

1. Apparatus for at least emptying a transport container (2), which is provided with a stack (3) of plate-shaped objects (4) comprising semiconductor wafers (5) and/or packaging material (6), with at least one measuring device (11), and with a holder (7), which can be inserted at least partly into the transport container (2) and which is provided with a holding surface (8), several holding nozzles (9) for at least holding an object (4) of the stack (3) and, in the region of the holding surface (8), at least one recess (10) for the measuring device (11) for acquisition of measured data from the object (4) of the stack (3), wherein the holder (7) is provided with at least one separating nozzle (12, 13), disposed on the holder (7) outside the holding surface (8) so as to be movable from a resting position (14, 15) into a separating position (16, 17) in such a way that, in the separating position (16, 17), the separating nozzle (12, 13) generates a gas stream (18, 19) directed onto the end face (20) of the stack (3), in order to loosen at least one other object (22) of the stack (3) adhering to the object (21) held by the holder (7).