Fault Detection Using Showerhead Voltage Variation

摘要

Methods and systems for detecting processing conditions of a plasma processing system are provided. One method includes providing radio frequency (RF) power from an RF power supply to a showerhead of the plasma processing system and running a process operation on a substrate disposed in the plasma processing system. The method further includes sensing a voltage the showerhead using a voltage probe that is connected in-line between the RF power supply and the showerhead. The sensing of the voltage produces voltage values during the running of the process operation. The method includes comparing the voltage values against a voltage check band that is predefined for the process operation being run. The comparing is configured to detect when the voltage values are outside of the voltage check band. The method also includes generating an alert when the comparing detects that the voltage values are outside of the voltage check band. The alert further configured to identify a type of fault based on the voltage check band that was predefined for the process operation.

主权项

1. A method for detecting processing conditions of a plasma processing system, comprising,
providing radio frequency (RF) power from an RF power supply to a showerhead of the plasma processing system; running a process operation on a substrate disposed in the plasma processing system; sensing a voltage the showerhead using a voltage probe that is connected in-line between the RF power supply and the showerhead, the sensing of the voltage producing voltage values during the running of the process operation; comparing the voltage values against a voltage check band that is predefined for the process operation being run, the comparing is configured to detect when the voltage values are outside of the voltage check band; and generating an alert when the comparing detects that the voltage values are outside of the voltage check band, the alert further configured to identify a type of fault based on the voltage check band that was predefined for the process operation.