| 摘要 |
PROBLEM TO BE SOLVED: To correctly measure and control the center wavelength of a laser beam by using a simple configuration in a laser apparatus capable of one peak oscillation and two peak oscillation. SOLUTION: The number of peaks of a fringe and peak strength thereof are detected by a line sensor of a wavelength monitor 22. A controller 15 adjusts the peak strength of the fringe and determines the number of peaks thereof. If the number of peaks is n (one peak oscillation); the center wavelength is decided based on the inner diameter (Di) and outer diameter (Do) of the fringe on the line sensor, and a center wavelength control mechanism 13b controls the center wavelength. If the number of peaks is 2n (2 peak oscillation); the center wavelength between two peaks (interpeak center wavelength) is obtained from the internal diameter (Di1) of the internal portion of the internal peak of the two peaks and the outer dimension (Do2) of the outer portion of the outer peak, and the mechanism 13b controls the interpeak center waveform. Also, a peak interval control mechanism 13c controls a peak interval. COPYRIGHT: (C)2007,JPO&INPIT
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