发明名称 MULTI-WAVELENGTH OSCILLATION NARROW BAND EXCIMER LASER DEVICE
摘要 PROBLEM TO BE SOLVED: To inexpensively, compactly, simultaneously and stably generate a plurality of wavelengths without providing a plurality of narrowbanding means. SOLUTION: Reflection mirrors 6a, 6b are inserted into an optical path in a narrowbanded module so as to divide a laser beam into two. Beams 8, 7 reflected on the mirrors 6a, 6b are incident at anglesθ1,θ2 into a grating 5, the incident beams 7, 8 are returned to a chamber 1 as a narrowbanded light around wavelengthsλ1,λ2 by a diffraction effect of the grating 5, and are taken out as a laser beam from an output mirror 3. By adjusting the installation angles of the mirrors 6a, 6b, the wavelengthsλ1,λ2 to be output can be changed. Also, the grating 5, a prism 4 or an output mirror 3 may be divided instead of the mirror 5. Further, a wedge substrate may be inserted into the optical path in the narrowbanding module. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006269628(A) 申请公布日期 2006.10.05
申请号 JP20050083852 申请日期 2005.03.23
申请人 GIGAPHOTON INC;KOMATSU LTD 发明人 SAITO TAKASHI;NOTOMI RYOICHI;WAKABAYASHI OSAMU;SUZUKI TORU;MIMURA TATSUO
分类号 H01S3/1055 主分类号 H01S3/1055
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