| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head having high discharge performance by solving a problem relevant to reservoir compliance and flow passage resistance in the same constitution as before, and to provide a liquid droplet discharge apparatus, and manufacturing methods therefor. SOLUTION: The liquid droplet discharge head is provided with at least: a nozzle substrate 30 having a plurality of nozzle holes 31 to discharge liquid as liquid droplets; a plurality of recesses 21a formed in conformity with the respective nozzle holes 31 and made to be discharge chambers 21 provided with diaphragms 22 to pressurize the liquid by vibration; a cavity substrate 20 having a reservoir penetrating groove hole 26a being a part of reservoir 26 storing the liquid supplied to the plurality of recesses; and an electrode substrate 10 having a reservoir recess 16 being a part of the reservoir 26 on a contact surface side between fixed electrodes 12 to vibrate the diaphragms 22 and the cavity substrate 20. In this case, the cavity substrate 20 and the electrode substrate 10 are bonded to each other, and the reservoir 26 is formed at least of the reservoir penetrating groove hole 26a and the reservor recess 16. COPYRIGHT: (C)2007,JPO&INPIT
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