发明名称 |
VAPOR BASED COMBINATORIAL PROCESSING |
摘要 |
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
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申请公布号 |
US2009061646(A1) |
申请公布日期 |
2009.03.05 |
申请号 |
US20080205578 |
申请日期 |
2008.09.05 |
申请人 |
CHIANG TONY P;SHANKER SUNIL;LNG CHI-I |
发明人 |
CHIANG TONY P.;SHANKER SUNIL;LNG CHI-I |
分类号 |
H01L21/31;H01L21/30 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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