| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce force in other directions to be applied to a mobile object when the mobile object is driven to a target direction. <P>SOLUTION: This positioning device is provided with: a system including a current amplifier 534X which drives X1, X2 electromagnets (first actuators) for positioning the mobile object in the X direction; a system including a current amplifier 534Y which drives Y1, Y2 electromagnets (second actuators) for positioning the mobile object in the Y direction; an other direction component correction part 601X which reduces force in the Y direction acting on the mobile object when the mobile object is driven in the X direction by the first actuators; and an other direction component correction part 601Y which reduces force in the X direction acting on the mobile object when the mobile object is driven in the Y direction by the second actuators. <P>COPYRIGHT: (C)2009,JPO&INPIT |
