| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating body that suppresses a temperature rise in a discharge space at the central part. <P>SOLUTION: The plasma generating body has a plurality of dielectrics 3 arrayed in one direction, and each conductor 5 arranged in the inside of each dielectric 3 so as to generate plasma in a discharge space between the dielectrics 3 by applying a voltage between the conductors 5. The plasma generating body is configured to have four or more dielectrics 3. An electric resistance value of the first conductor arranged in the inside of the dielectric at the central part in the array direction of the dielectrics is smaller than that of the second conductor arranged in the inside of the dielectric at the end part. <P>COPYRIGHT: (C)2009,JPO&INPIT |
