METHOD OF FABRICATING WAVELENGTH CONVERSION DEVICE

摘要

Disclosed is a method for fabricating a wavelength conversion device that is capable of suppressing unintended and random polarization reversal due to heating thereby achieving higher wavelength conversion efficiency. The method includes: forming an insulating layer on one place of a crystal substrate naturally and uniformly polarized in a thickness direction; forming an insulating layer pattern with line-and-space by photolithography; then supplying conductive fluid to both planes of the crystal substrate to apply voltage to the crystal substrate, thereby a wavelength conversion device that is periodically polarization-reversed is fabricated. When temperature of the crystal substrate decreases after heating, an ionizer supplies ions to a surface of the crystal substrate, negative ions collect on +z plane, and positive ion collect on −z plane, thereby unintended and random polarization reversal is suppressed.

主权项

1. A method of fabricating a wavelength conversion device, the device being fabricated from a crystal substrate and formed from a ferroelectric crystal demonstrating a non-linear optical effect, the method comprising:
heating the crystal substrate; suppressing a polarization reversal on a surface of the crystal substrate in which natural polarization occurs when temperature of the crystal substrate being changing due to the heating; and forming a structure that is periodically polarization-reversed in the direction perpendicular to a thickness direction of the crystal substrate on the surface of the crystal substrate.