发明名称 加工装置
摘要 PROBLEM TO BE SOLVED: To provide a processing device such that it is easy for an operator of the processing device to know an item exceeding an allowable value.SOLUTION: There is provided the processing device including a chuck table and processing means, the processing device including: input means of inputting processing conditions and allowable values of a plurality of confirmation items for confirming the quality of processing carried out on a workpiece; display means 26 of displaying the input processing conditions and the respective allowable values of the plurality of confirmation items; imaging means of imaging a region of the workpiece having been processed during the processing; a storage part which stores the input processing conditions and the respective allowable values of the plurality of confirmation items; a determination part which determines whether the plurality of confirmation items exceed the respective allowable values on the basis of the generated picked-up image and the respective allowable values of the plurality of confirmation items stored in the storage part; and a display command part which displays a confirmation item exceeding its allowable value as an error item 40 on the display means on the basis of results of determinations made by the determination part.
申请公布号 JP6029271(B2) 申请公布日期 2016.11.24
申请号 JP20110213282 申请日期 2011.09.28
申请人 株式会社ディスコ 发明人 徳満 直哉
分类号 H01L21/301;B24B49/12 主分类号 H01L21/301
代理机构 代理人
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