Method and apparatus for measuring mechanical properties on a small scale

摘要

The mechanical properties of a surface are measured by using a pointed tip on the end of a bendable cantilever such that with force on the other end of the cantilever the tip can be pushed into the surface using the bending of the cantilever as the measure of the constant force. The indentation, scratch, or wear created by the application of forces between the tip and sample is then measured with the same tip and cantilever by raising the cantilever off the surface and putting it into oscillation. The tip is then scanned over the area where the indentation was made with the tip tapping on the surface in order to image the surface.