发明名称 |
Optical projection lens system |
摘要 |
An optical projection lens system comprising in direction of propagating radiation a first lens group having positive refractive power a second lens group having negative refractive power and comprises a waist with a minimum diameter of the propagating radiation a further lens arrangement with positive refracting power, which follows the second lens group, wherein at least one lens of the projection lens system, which is arranged in front of the waist comprises an aspherical surface. <IMAGE>
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申请公布号 |
EP1094350(A2) |
申请公布日期 |
2001.04.25 |
申请号 |
EP20000119874 |
申请日期 |
2000.09.13 |
申请人 |
CARL ZEISS;CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS |
发明人 |
SHAFER, DAVID R.;ULRICH, WILHELM |
分类号 |
G02B3/00;G02B9/00;G02B13/14;G02B13/18;G02B13/24;G03F7/20;H01L21/027;(IPC1-7):G02B13/14 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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