APPARATUS FOR TREATING GLASS PANEL UNDER VACUUM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for treating a glass panel under vacuum in which the leak of a gas from a seal edge under evacuation is suppressed to reduce evacuation time and high degree of vacuum is kept for a long time. SOLUTION: An exhaust cup 1 is provided with a cylindrical main body 100, a main exhausting part 104 which is at the center position of the main body and opens over the almost whole surface of the contact surface with back face plate glass 203 in a plasma display panel (PDP) 200 and a differential exhausting part 102 which is at the outer periphery of the exhausting part 104 and opens over the almost whole surface of a contact surface with the back face plate glass 203. The surface roughness Ra of a seal edge 107a of the exhausting part 104 and a seal edge part 107b of the differential exhausting part 102 is <0.1μm. COPYRIGHT: (C)2005,JPO&NCIPI